Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/36126
Or use following links to share this resource in social networks: Recommend this item
Title Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”
Authors Odinokov, V.V.
Pavlov, G.Ya.
Panin, V.V.
Raschinsky, V.P.
Shpakov, A.N.
Shubnikov, A.V.
ORCID
Keywords Vacuum system
Magnetron sputtering
Thin film deposition
Multilayer metallic coatings
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/36126
Publisher Sumy State University
License
Citation V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014)
Abstract A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36126
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

Views

China China
3
France France
19854
Germany Germany
2003
Greece Greece
3145345
Ireland Ireland
238310721
Lithuania Lithuania
1
Netherlands Netherlands
19852
Russia Russia
10
Ukraine Ukraine
115978
United Kingdom United Kingdom
1593263476
United States United States
-1101553602
Unknown Country Unknown Country
34061776
Vietnam Vietnam
3145347

Downloads

China China
26
Germany Germany
2
Ireland Ireland
1
Lithuania Lithuania
1
Ukraine Ukraine
212498713
United Kingdom United Kingdom
1
United States United States
-1101553601
Unknown Country Unknown Country
109
Vietnam Vietnam
1

Files

File Size Format Downloads
Small-scale Vacuum System for Deposition of Multilayer Metallic Films.pdf 314,79 kB Adobe PDF -889054747

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.