Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/37173
Title: Structural Properties of the SnxSy Films Obtained by the Thermal Vacuum Co-evaporation
Authors: Voznyi, A.A.
Kosyak, V.V.
Opanasiuk, Anatolii Serhiiovych 
Kuznetsov, V.М.
Keywords: Thin Films
SnxSy
Co-evaporation
Surface morphology
X-ray diffraction
Crystal structure
Issue Year: 2014
Publisher: Sumy State University
Citation: Proc. NAP 3, 01NTF26 (2014)
Abstract: The present work deals with the study of the structural properties of the SnxSy thin films deposited by the closed-spaced vacuum co-evaporation (CSVCE) method. Calculation of temperature dependencies of the sulfur and tin vapor pressures allows to estimate growth conditions of the films with the stoichiometric composition. The effect of growth conditions on surface morphology and structural properties of SnxSy films were studied. Surface morphology of obtained films was determined by the scanning electron microscope (SEM-102Е). Structural investigations of the films were performed with the X-ray diffraction (XRD) method. The analysis of chemical composition of the layers was carried out by the scanning electron microscope by energy dispersive X-ray (ЕDAX) spectroscopy. Influence of the substrate temperature on chemical composition of thin films and their structural characteristics was also investigated.
URI: http://essuir.sumdu.edu.ua/handle/123456789/37173
Type: Article
Appears in Collections:Наукові видання (ЕлІТ)

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