Showing results 1 to 3 of 3
Issue Year | Title | Author(s) | Type | Views | Downloads |
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2013 | Features of Structure of Magnetron Films Si3N4 and SiC | Kuzmenko, A.P.; Chekadanov, A.S.; Zakhvalinsky, S.V.; Pilyuk, E.A.; Dobromyslov, M.B. | Article | 430518583 | 440081068 |
2015 | Microstructure and properties of ceramics based on silicon nitride obtained by cold iso-static pressing and free sintering | Lukianova, O.A. | Conference Papers | 99148051 | 95823687 |
2014 | RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells | Zakhvalinskii, V.S.; Piljuk, E.A.; Goncharov, I.Yu.; Rodriges, V.G.; Kuzmenko, A.P.; Taranenko, S.V.; Abakumov, P.A. | Article | 148403365 | 235955323 |