Showing results 1 to 2 of 2
Issue Year | Title | Author(s) | Type | Views | Downloads |
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2013 | Immersion Lithography with Using of Photostimulated Etching of Germanium Chalcogenide Films | Danko, V.A.; Indutnyi, I.Z.; Mynko, V.I.; Shepeliavyi, P.E.; Lykanyuk, M.V.; Litvin, O.S. | Conference Papers | -496357394 | 1396792128 |
2015 | Structure and properties of nanostructured NbN and Nb-Si-N films depending on the conditions of deposition: Experiment and theory | Ivashchenko, V.I.; Skrynskii, P.L.; Litvin, O.S.; Pohrebniak, Oleksandr Dmytrovych; Rogoz, V.N.; Abadias, G.; Sobol, O.V.; Kuz’menko, A.P. | Article | -1625034019 | -2055967507 |