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Issue Year | Title | Author(s) | Type | Views | Downloads |
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2014 | RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells | Zakhvalinskii, V.S.; Piljuk, E.A.; Goncharov, I.Yu.; Rodriges, V.G.; Kuzmenko, A.P.; Taranenko, S.V.; Abakumov, P.A. | Article | 24788991 | 186443539 |