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| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2013 | Effect of Added Nitrogen on Properties of SiCN Films Prepared by PECVD Using Hexamethyldisilazane | Porada, O.K.; Kozak, A.O.; Ivashchenko, L.A.; Ivashchenko, V.I.; Tomila, T.V. | Conference Papers | 1910237833 | 578161319 |