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| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2014 | Effect of Substrate Temperature on the Properties of PECVD SiCN Films | Porada, O.K.; Kozak, A.O.; Ivashchenko, V.I; Ivashchenkо, L.A.; Tomila, V. | Article | -1891152170 | -1411665486 |