Showing results 1 to 1 of 1
| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2014 | Effect of Substrate Temperature on the Properties of PECVD SiCN Films | Porada, O.K.; Kozak, A.O.; Ivashchenko, V.I; Ivashchenkо, L.A.; Tomila, V. | Article | -1891152176 | -1411665486 |