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| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2013 | Features of Structure of Magnetron Films Si3N4 and SiC | Kuzmenko, A.P.; Chekadanov, A.S.; Zakhvalinsky, S.V.; Pilyuk, E.A.; Dobromyslov, M.B. | Article | 90580853 | 94547058 |