The analysis of Al[2]O[3] coatings obtained by magnetron sputtering

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Title	The analysis of Al[2]O[3] coatings obtained by magnetron sputtering
Authors	Pohrebniak, Oleksandr Dmytrovych Illiashenko, Maksym Viktorovych Beresnev V.M., Kaverina, A.Sh. Yakushchenko, I.V.
ORCID	http://orcid.org/0000-0002-9218-6492
Keywords
Type	Conference Papers
Date of Issue	2011
URI	http://essuir.sumdu.edu.ua/handle/123456789/20673
Publisher	Видавництво СумДУ
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Citation	The analysis of Al[2]O[3] coatings obtained by magnetron sputtering [Текст] / A.D. Pogrebnjak, V.M. Beresnev, M.V. Iljashenko et al. // Nanomaterials: applications & properties. Proceedings : 1-st International conference, Alushta, Crimea, 27-30 Semptember 2011 / Edited by: A. Pogrebnjak, T. Lyutyy, S. Protsenko. - Sumy : Sumy State University, 2011. - V.1, P.І. - С. 204-211.
Abstract
Appears in Collections:	Наукові видання (ЕлІТ)