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Title | Molybdenum back-contact optimization for CIGS thin film solar cell |
Authors |
Ray, J.R.
Shah, N.M. Desai, M.S. Panchal, C.J. |
ORCID | |
Keywords |
высокочастотное магнетронное распыление високочастотне магнетроне розпилення Rf magnetron sputtering молибденовая тонкая пленка молібденова тонка плівка molybdenum thin film |
Type | Article |
Date of Issue | 2011 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/22118 |
Publisher | Видавництво СумДУ |
License | |
Citation | Molybdenum back-contact optimization for CIGS thin film solar cell [Текст] / J.R. Ray, N.M. Shsh, M.S. Desai, C.J. Panchal // Journal of Nano- and Electronic Physics. — 2011. — Vol.3, № 1, Part IV : Proceedings of the International Symposium on Semiconductor Materials and Devices (ISSMD-2011), Vadodara, India, 28-30 January 2011. — P. 766-775. |
Abstract |
Molybdenum (Mo) thin films are most widely used as an ohmic back-contact in the copper indium diselenide (CIS) and its alloy copper indium gallium diselenide (CIGS) based thin film solar cell. Radio frequency (RF) magnetron sputtering system
used to deposit Mo thin films on soda lime glass substrate. The deposition was carried out using argon (Ar) gas at different Ar controlled (working) pressures (1 mTorr to 10 mTorr) and at different RF powers (60 W to 100 W). The influence of both the
working pressure and the RF power on the Mo thin films was studied by investigating its structural, morphological, electrical, and optical measurements. The results reveal
that a stress-free, low-sheet-resistance (~1 W/), and reflecting (~ 55 %) Mo thin film was observed at 1 mTorr working pressure and 100 W RF power.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/22118 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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