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Title Formation of Nanostructured Thin Film Coatings for Nanocatalysts
Authors Tomilin, S.V.
Yanovsky, A.S.
ORCID
Keywords Nanostructuring
Palladium
Thermal annealing
Vacuum deposition
Type Article
Date of Issue 2012
URI http://essuir.sumdu.edu.ua/handle/123456789/24908
Publisher Видавництво СумДУ
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Citation S.V. Tomilin, A.S. Yanovsky, J. Nano-Electron. Phys. 4 No 1, 01013 (2012)
Abstract The paper presents the results of theoretical basis of possibility of nanostructured thin-film formation by mechanical stress creation in ultra-thin films deposited on a substrate during their thermal annealing. The experiment results of palladium (Pd) ultra-thin films obtained on silicon (Si) substrates and their vacuum annealing are also presented. The samples were studied by AES and SEM methods. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/24908
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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