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Title | Влияние параметров ВЧ – разряда на сверхтвердость, стехиометрию наноструктурных покрытий Zr-Ti-Si-N |
Authors |
Ткаченко, Роман Юрійович
Ткаченко, Роман Юрьевич Tkachenko, Roman Yuriiovych |
ORCID | |
Keywords |
ВЧ-разряд ВЧ-розряд RF discharge стехиометрия стехіометрія stoichiometry |
Type | Competitive_scientific_work |
Date of Issue | 2012 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/26553 |
Publisher | |
License | |
Citation | |
Abstract | |
Appears in Collections: |
Наукові роботи студентів, магістрів, аспірантів (ЕлІТ) |
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Files
File | Size | Format | Downloads |
---|---|---|---|
Tkachenko_Radioelektronika.pdf | 788.74 kB | Adobe PDF | -95842425 |
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