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Title Влияние параметров ВЧ – разряда на сверхтвердость, стехиометрию наноструктурных покрытий Zr-Ti-Si-N
Authors Ткаченко, Роман Юрійович
Ткаченко, Роман Юрьевич
Tkachenko, Roman Yuriiovych
ORCID
Keywords ВЧ-разряд
ВЧ-розряд
RF discharge
стехиометрия
стехіометрія
stoichiometry
Type Competitive_scientific_work
Date of Issue 2012
URI http://essuir.sumdu.edu.ua/handle/123456789/26553
Publisher
License
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Abstract
Appears in Collections: Наукові роботи студентів, магістрів, аспірантів (ЕлІТ)

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