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Title | An Improved SPICE Model for MEMS Based Capacitive Accelerometers |
Authors |
Kavitha, C.
Madhan, M. Ganesh |
ORCID | |
Keywords |
Squeezed film Capacitive accelerometer Thermal effect Damping Electrical attractive force |
Type | Article |
Date of Issue | 2013 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/31005 |
Publisher | Сумський державний університет |
License | Copyright not evaluated |
Citation | C. Kavitha, M. Ganesh Madhan, J. Nano- Electron. Phys. 5 No 2, 02011 (2013) |
Abstract |
An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/31005 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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File | Size | Format | Downloads |
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Kavitha C._Electrical attractive force.pdf | 3.46 MB | Adobe PDF | -1653648214 |
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