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Title | Features of Structure of Magnetron Films Si3N4 and SiC |
Authors |
Kuzmenko, A.P.
Chekadanov, A.S. Zakhvalinsky, S.V. Pilyuk, E.A. Dobromyslov, M.B. |
ORCID | |
Keywords |
Small-angle X-ray scattering Atomic force microscopy Silicon nitride Silicon carbide Thin films |
Type | Article |
Date of Issue | 2013 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/33652 |
Publisher | Сумський державний університет |
License | Copyright not evaluated |
Citation | A.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, et al., J. Nano- Electron. Phys. 5 No 4, 04025 (2013) |
Abstract |
By small-angle X-ray scattering and atomic force microscopy shows the features of the structure of thin films of Si3N4 and SiC, deposited by magnetron sputtering on glass substrates.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33652 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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Kuzmenko_Thin films.pdf | 530.14 kB | Adobe PDF | 94547058 |
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