Features of Structure of Magnetron Films Si3N4 and SiC

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Title	Features of Structure of Magnetron Films Si3N4 and SiC
Authors	Kuzmenko, A.P. Chekadanov, A.S. Zakhvalinsky, S.V. Pilyuk, E.A. Dobromyslov, M.B.
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Keywords	Small-angle X-ray scattering Atomic force microscopy Silicon nitride Silicon carbide Thin films
Type	Article
Date of Issue	2013
URI	http://essuir.sumdu.edu.ua/handle/123456789/33652
Publisher	Сумський державний університет
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Citation	A.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, et al., J. Nano- Electron. Phys. 5 No 4, 04025 (2013)
Abstract	By small-angle X-ray scattering and atomic force microscopy shows the features of the structure of thin films of Si3N4 and SiC, deposited by magnetron sputtering on glass substrates. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33652
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)