Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method

Vasyliev, V.V.; Luchaninov, A.A.; Reshetnyak, E.N.; Strelnitskij, V.E.

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Title	Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method
Authors	Vasyliev, V.V. Luchaninov, A.A. Reshetnyak, E.N. Strelnitskij, V.E.
ORCID
Keywords	Nitride coatings Solid solution Filtered vacuum arc deposition Pulsed substrate bias Residual stress
Type	Conference Papers
Date of Issue	2012
URI	http://essuir.sumdu.edu.ua/handle/123456789/34913
Publisher	Sumy State University
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Citation	Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method / V. V. Vasyliev, A. A. Luchaninov, E. N. Reshetniak, V. E. Strelnitskij // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No2. - 02NFC24-02NFC24
Abstract	A comparative study of the structure and stress state of Ti0.5-xAl0.5YxN and TiN coatings deposited under identical conditions from the filtered vacuum-arc plasma under high voltage pulsed bias potential on the substrate was carried out. It was found that for Ti0.5Al0.5N coatings the dependence of the residual stress on the amplitude of the pulsed voltage potential is non-monotonic with a minimum when the amplitude is of 1 kV. As for TiN films, a monotonic decrease in the level of residual stresses takes place when the amplitude of the potential is increased in the range 0-2.5 kV. Non-monotonic dependence for multicomponent coatings Ti-Al-Y-N may occur due to the possibility of phase transition associated with the decay of the supersaturated solid solution (Ti,Al)N stimulated by high energy ion bombardment. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/34913
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