Metal Films as Mass Standard Samples in the Nano-Gram Range

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Title	Metal Films as Mass Standard Samples in the Nano-Gram Range
Authors	Mikhailov, I.F. Baturin, A.A. Bugaev, Ye.A. Mikhailov, A.I. Borisova, S.S.
ORCID
Keywords	Thin Films Nano-Standards Magnetron Sputtering X-ray Fluorescent Method X-ray Reflectometry
Type	Conference Papers
Date of Issue	2013
URI	http://essuir.sumdu.edu.ua/handle/123456789/35167
Publisher	Sumy State University
License	Copyright not evaluated
Citation	Metal Films as Mass Standard Samples in the Nano-Gram Range [Текст] / I.F. Mikhailov, A.A. Baturin, Y.A. Bugaev et al. // Nanomaterials: Applications & Properties (NAP-2013) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2013. - V.2, No1. - 01NTF17
Abstract	Attestation of magnetron sputtered films as mass standards is presented. Homogeneous, long-lived metal films were measured by different methods for comparison. The accuracy of the order 1 ng was found to be provided by application of the metal film standards for element analysis by X-ray fluorescent method. Keywords: Thin Films, Nano-Standards, Magnetron Sputtering, X-ray Reflectometry, X-ray Fluorescent When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35167
Appears in Collections:	Наукові видання (ЕлІТ)