Equilibrium Behavior for Transition Metal Ionic Species in Liquid Phase Deposition Reaction

Abstract

We tried to clarify to the deposition mechanism by applying the 11B and 19F NMR analyses to the LPD reaction solutions for the preparing titanium oxide films with various reaction conditions. Moreover, the optimum conditions of the syntheses of 3d transition metal oxide thin films were investigated by con-trolling pH and the concentration of reacting species. In the reaction of TiO2 deposition, TiF62- do not re-lease all F- ions, namely, the existence of hydrolysis intermediate species (TiFx(OH)y(H2O)6-x-y(4-x-y)) which could not be detected by 19F NMR because of the rapid ligand exchange in the LPD reaction solu-tions. In the reaction of Cr2O3 deposition, the optimization of the LPD reaction can be carried out by the controlling of the concentrations of reaction species and pH. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35228