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Title Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion
Authors Kalinichenko, A.I.
Strel'nitskij, V.E.
Vasyliev, V.V.
ORCID
Keywords DLC coating
Plasma-based ion deposition
Pulse mode deposition
Intrinsic stress
Phase P
Tdiagram of carbon
Non-local thermoelastic peak of ion
Type Conference Papers
Date of Issue 2012
URI http://essuir.sumdu.edu.ua/handle/123456789/35398
Publisher Sumy State University
License
Citation Kalinichenko, A. I. Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion / A. I. Kalinichenko, V. E. Strel'nitskij, V. V. Vasyliev // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE07
Abstract A mode of pulse biasing of DLC coating deposition is theoretically investigated. In this mode a deposited ion flow of plasma with energy of E0 (20 200) eV is modified by superimposing of pulse potential ~ 1000 V. It was shown that intrinsic stress in a DLC coating can be decreased in several times without of essential decrease of sp3-bonded carbon concentration compared with DLC made in stationary mode deposition at E0 ion energy. A method of optimization of pulse mode parameters is proposed which is based on analysis of location of thermoelastic peaks of ions on phase P, T-diagram of carbon. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35398
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