Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion

Kalinichenko, A.I.; Strel'nitskij, V.E.; Vasyliev, V.V.

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Title	Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion
Authors	Kalinichenko, A.I. Strel'nitskij, V.E. Vasyliev, V.V.
ORCID
Keywords	DLC coating Plasma-based ion deposition Pulse mode deposition Intrinsic stress Phase P Tdiagram of carbon Non-local thermoelastic peak of ion
Type	Conference Papers
Date of Issue	2012
URI	http://essuir.sumdu.edu.ua/handle/123456789/35398
Publisher	Sumy State University
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Citation	Kalinichenko, A. I. Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion / A. I. Kalinichenko, V. E. Strel'nitskij, V. V. Vasyliev // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE07
Abstract	A mode of pulse biasing of DLC coating deposition is theoretically investigated. In this mode a deposited ion flow of plasma with energy of E0 (20 200) eV is modified by superimposing of pulse potential ~ 1000 V. It was shown that intrinsic stress in a DLC coating can be decreased in several times without of essential decrease of sp3-bonded carbon concentration compared with DLC made in stationary mode deposition at E0 ion energy. A method of optimization of pulse mode parameters is proposed which is based on analysis of location of thermoelastic peaks of ions on phase P, T-diagram of carbon. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35398
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