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Title | Advanced Ion and Plasma Sources for Materials Surface Engineering |
Authors |
Petrov, A.
Alexandrov, A. Kralkina, E. Nekliudova, P. Vavilin, K. Pavlov, V. |
ORCID | |
Keywords |
Ion Source Plasma Source Surface Modification Plasma Ion Beam |
Type | Conference Papers |
Date of Issue | 2012 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/35409 |
Publisher | Sumy State University |
License | Copyright not evaluated |
Citation | Advanced Ion and Plasma Sources for Materials Surface Engineering / A. Petrov, A. Alexandrov, E. Kralkina et al. // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE0 |
Abstract |
The paper presents the results of the authors many year work in the field of ion&plasma sources development.
The families of DC and RF ion and plasma sources are described. The results of ion&plasma
sources utilization in materials surface modification technologies are discussed.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35409 |
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