Advanced Ion and Plasma Sources for Materials Surface Engineering

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Title	Advanced Ion and Plasma Sources for Materials Surface Engineering
Authors	Petrov, A. Alexandrov, A. Kralkina, E. Nekliudova, P. Vavilin, K. Pavlov, V.
ORCID
Keywords	Ion Source Plasma Source Surface Modification Plasma Ion Beam
Type	Conference Papers
Date of Issue	2012
URI	http://essuir.sumdu.edu.ua/handle/123456789/35409
Publisher	Sumy State University
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Citation	Advanced Ion and Plasma Sources for Materials Surface Engineering / A. Petrov, A. Alexandrov, E. Kralkina et al. // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE0
Abstract	The paper presents the results of the authors many year work in the field of ion&plasma sources development. The families of DC and RF ion and plasma sources are described. The results of ion&plasma sources utilization in materials surface modification technologies are discussed. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35409
Appears in Collections:	Наукові видання (ЕлІТ)