Development of the RF Ion Sources for Focused Ion Beam Accelerators

Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/35555

Or use following links to share this resource in social networks: Recommend this item

Title	Development of the RF Ion Sources for Focused Ion Beam Accelerators
Authors	Voznyi, V. Miroshnichenko, V. Mordyk, S. Shulha, D. Storizhko, V. Tokman, V.
ORCID
Keywords	RF ion source Plasma Inductive Helicon Multicusp Sputtering
Type	Article
Date of Issue	2013
URI	http://essuir.sumdu.edu.ua/handle/123456789/35555
Publisher	Sumy State University
License
Citation	Development of the RF Ion Sources for Focused Ion Beam Accelerators [Текст] / V. Voznyi, V. Miroshnichenko, S. Mordyk et al. // Журнал нано- та електронної фізики. - 2013. - Т.5, №4, Ч.ІІ. - 04060.
Abstract	The paper presents the results of investigations of ion sources developed in the IAP of NAS of Ukraine for generation of high brightness ion beams with small energy spread. A series of RF ion sources operated at the frequency of 27.12 MHz were studied: the inductive RF ion source, the helicon ion source, the multi-cusp RF ion source, and the sputter type RF source of metal ions. A global model and transformer model were applied for calculation of RF source plasma parameters. Ion energy spread, ion mass, and ion current density of some sources were measured in the wide range of RF power, extraction voltage and gas pres-sure. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35555
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)