Formation of Biphasic State in Vacuum-Arc Coatings Obtained by Evaporation of Ti-Al-Zr-Nb-Y Alloy in the Atmosphere of Nitrogen

Beresnev, V.M.; Sobol, O.V.; Toryanik, I.N.; Meylekhov, A.A.; Nyemchenko, U.S.; Turbin, P.V.; Yakushchenko, I.V.; Lisovenko, M.O.

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Title	Formation of Biphasic State in Vacuum-Arc Coatings Obtained by Evaporation of Ti-Al-Zr-Nb-Y Alloy in the Atmosphere of Nitrogen
Authors	Beresnev, V.M. Sobol, O.V. Toryanik, I.N. Meylekhov, A.A. Nyemchenko, U.S. Turbin, P.V. Yakushchenko, I.V. Lisovenko, M.O.
ORCID
Keywords	Vacuum-Arc Deposition Method Mechanical Characteristics of Coatings Refractory Metal Nitride Coatings
Type	Article
Date of Issue	2014
URI	http://essuir.sumdu.edu.ua/handle/123456789/35850
Publisher	Sumy State University
License	Copyright not evaluated
Citation	Formation of Biphasic State in Vacuum-Arc Coatings Obtained by Evaporation of Ti-Al-Zr-Nb-Y Alloy in the Atmosphere of Nitrogen [Текст] / V.M. Beresnev, O.V. Sobol, I.N. Toryanik et al. // Журнал нано- та електронної фізики. — 2014. — Т.6, №1. — 01030.
Abstract	By means of X-ray diffraction, transmission and scanning electron microscopy, energy dispersive spectroscopy and indentation methods, the effect of nitrogen atmosphere pressure on composition, structure and hardness of vacuum-arc (Ti-Al-Zr-Nb-Y)N coatings during the deposition process has been studied. The two-phase state of the coating with solid-solution metal component (bcc lattice) and nitride phase (fcc lattice) have been formed. Increasing the pressure of nitrogen atmosphere leads to the increase of nitrogen component in the coating as well as to increase of the ordering regions size, allowing to achieve the hardness of H = 49 GPa at a pressure of P = 0.5 Pa. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35850
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)