Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”

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Title	Small-scale Vacuum System for Deposition of Multilayer Metallic Films “MVU TM – Magna 3M”
Authors	Odinokov, V.V. Pavlov, G.Ya. Panin, V.V. Raschinsky, V.P. Shpakov, A.N. Shubnikov, A.V.
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Keywords	Vacuum system Magnetron sputtering Thin film deposition Multilayer metallic coatings
Type	Article
Date of Issue	2014
URI	http://essuir.sumdu.edu.ua/handle/123456789/36126
Publisher	Sumy State University
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Citation	V.V. Odinokov, G.Ya. Pavlov, V.V. Panin, et al., J. Nano- Electron. Phys. 6 No 3, 03015 (2014)
Abstract	A new small-scale vacuum system “MVU TM-Magna 3M” developed at JSC “Research Institute of Pre-cision Machine Manufacturing” is described. Its assembly and working conditions are considered. This sys-tem was used for magnetron sputtering multilayer metallic films. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36126
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)