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Title | Small Angle X-ray Scattering in Thin Iron Films |
Authors |
Chekadanov, A.S.
Kuzmenko, A.P. Emelyanov, S.G. Chevyakov, L.M. Dobromyslov, M.B. |
ORCID | |
Keywords |
Small angle X-ray scattering Atomic force Scanning electron Digital holographic microscopy Thin magnetron films |
Type | Article |
Date of Issue | 2014 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/36258 |
Publisher | Sumy State University |
License | |
Citation | A.S. Chekadanov, A.P. Kuzmenko, S.G. Emelyanov, et al., J. Nano- Electron. Phys. 6 No 3, 03023 (2014) |
Abstract |
By small angle X-ray scattering (SAXS) and atomic force microscopy characteristic sizes are deter-mined, structural features of thin iron films deposited by magnetron evaporation onto substrates from py-roceramics are established. It is shown that morphologically the film is characterized by disorder. It is
formed from columnar nano crystallites that are oriented either perpendicular to the substrate or situated
in its plane, which dictates polydispersity of those coatings. It is shown that SAXS may be thought of as
nondestructive technique for analyzing structure and composition and conducting quality control of mag-netron films.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36258 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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