Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/36276
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Features of Electronic Emission from Surface of Dielectric Thin-film Materials with Ion-beam Etching |
Authors |
Kurochka, A.
Sergienko, A. Kurochka, S. Kolybelkin, V. |
ORCID | |
Keywords |
Ion-electronic emission Ion-beam etching Secondary electron current Electric field strength Electron affinity Surface electron states Surface potential |
Type | Article |
Date of Issue | 2014 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/36276 |
Publisher | Sumy State University |
License | Copyright not evaluated |
Citation | A. Kurochka, A. Sergienko, S. Kurochka, V. Kolybelkin, J. Nano- Electron. Phys. 6 No 3, 03031 (2014) |
Abstract |
This work presents a series of experimental studies aimed at validating the main theoretical aspects of
the ion-electron emission in conditions of ion-beam etching and lookup the possibility of practical realiza-tion of the method of operative control processes ion-beam etching different dielectric thin film materials of
electronic technics.
In the real article the estimation of influence of the pointed superficial potential is conducted in dielec-tric tape on the integral signal of secondary electrons at an ionic etch.
The electric field strength in dielectric film under the influence of the induced potential creates prereq-uisites for the emergence of "Malterovskay" emission, defined by properties actually dielectric and proper-ties of the substrate.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36276 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
Views

24

12197520

3052308

24406

167088430

1

24394

24396

-1486382730

2

117296

2131720177

-32109257

1322201835

3052306
Downloads

1

1322201834

2

1

1

3

121577

1

-1486382731

1322201836

1
Files
File | Size | Format | Downloads |
---|---|---|---|
Features of Electronic Emission from Surface of Dielectric Thin-film Materials.pdf | 364.66 kB | Adobe PDF | 1158142526 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.