Laser-induced Formation of Conductive Structures on Diamond-like Carbon Films

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Title	Laser-induced Formation of Conductive Structures on Diamond-like Carbon Films
Authors	Chumakov, A.N. Nikonchuk, I.S. Poklonski, N.A. Gorbachuk, N.I. Obukhov, V.E.
ORCID
Keywords	Diamond-like carbon films Laser modification Surface resistance Nanocrystalline graphite
Type	Article
Date of Issue	2014
URI	http://essuir.sumdu.edu.ua/handle/123456789/37119
Publisher	Sumy State University
License	Copyright not evaluated
Citation	Proc. NAP 3, 01PCSI09 (2014)
Abstract	Modification of diamond-like carbon (DLC) films by laser radiation with a wavelength of 532 nm and pulse duration of 18 ns was investigated. The treatment of DLC films with laser fluence over 0.4 J/cm2 was accompanied by the formation of conductive structures with a surface resistance from a few to hundreds kΩ/sq. Dependence of films conductivity from the laser fluence was established. Relationship between energy density of laser radiation and the structural changes in the films, its heating and evaporation is discussed.
Appears in Collections:	Наукові видання (ЕлІТ)