Structural Features Amorphous-like Coatings AlN-TiB2-TiSi2 After Annealing (900, 1300)ºC and their Impact on Physical and Mechanical Properties Changes

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Title	Structural Features Amorphous-like Coatings AlN-TiB2-TiSi2 After Annealing (900, 1300)ºC and their Impact on Physical and Mechanical Properties Changes
Authors	Demianenko, A.A. Partyka, J. Belovol, K.O.
ORCID
Keywords	Nanocomposite Magnetron sputtering Phase and elemental composition Microhardness Annealing
Type	Article
Date of Issue	2014
URI	http://essuir.sumdu.edu.ua/handle/123456789/37123
Publisher	Sumy State University
License	Copyright not evaluated
Citation	Proc. NAP 3, 01PCSI13 (2014)
Abstract	The magnetron sputtered coatings on base AlN-TiB2(TiSi2) were investigated. The element composition, structural-phase composition, morphology were investigated before and after annealing of coatings with 9000C, 13000C using SEM/EDS, AFM, SIMS, XRD, 3D Laser, Nanoindenter. The concentrations of elements in the coating were changed after annealing under 9000C and further annealing under 13000C. Achieving viscoplastic index of 0.07 value when the hardness H = 15.3 GPa, provides high damping properties of the coating, wherein an amorphous structure is promising to use coatings such as diffusion barriers in the form of separate elements or as a layer in contact of multilayer wear resistant coatings.
Appears in Collections:	Наукові видання (ЕлІТ)