Structural and Mechanical Properties of Nanocomposite Nb-Al-N Films

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Title	Structural and Mechanical Properties of Nanocomposite Nb-Al-N Films
Authors	Ivashchenko, V.I Skrynskyy, P.L. Kozak, A.O Pohrebniak, Oleksandr Dmytrovych Timofeyeva, I.I. Dub, S.N.
ORCID	http://orcid.org/0000-0002-9218-6492
Keywords	Nb-Al-N films AlN films Magnetron sputtering Film structure Mechanical properties Nanoindentation
Type	Article
Date of Issue	2014
URI	http://essuir.sumdu.edu.ua/handle/123456789/37182
Publisher	Sumy State University
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Citation	Proc. NAP 3, 01NTF17 (2014)
Abstract	Nb-Al-N films were deposited by magnetron sputtering of the Nb and Al targets in the Ar-N2 atmosphere on silicon wafers at various currents supplied to the magnetron device with the Al target (IAl=100, 150, 200, 300 mA). The films were studied with XRD, FTIR spectroscopy, as well by nanoindentation and Knoop indentation tests. The films were found to have the nanocomposite nc-B1-NbNx/a-AlN structure and exhibit the nanohardness and Knoop hardness in the ranges of 29-33.5 GPa and 46-48 GPa, respectively. The hardness and elastic modulus has an extreme dependence on IAl.
Appears in Collections:	Наукові видання (ЕлІТ)