Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow

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Title	Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow
Authors	Pohrebniak, Oleksandr Dmytrovych Beresnev, V.M. Klimenko, S.A. Toryanik, I.N. Sobol, O.V. Turbin, P.V. Grankin, S.S.
ORCID	http://orcid.org/0000-0002-9218-6492
Keywords	protective coatings vacuum–arc deposition nitrides of metals cutting tools
Type	Article
Date of Issue	2014
URI	http://essuir.sumdu.edu.ua/handle/123456789/38060
Publisher	Springer
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Citation	Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow [Text] / V.M. Beresnev, S.A. Klimenko, I.N. Toryanik [et al.] // Journal of Superhard Materials. — 2014. — Vol. 36, №1. — P. 29-34.
Abstract	Multicomponent hard coatings based on nitrides of Si doped transition metals have been produced by vacuum–arc deposition with the use of a RF generator and separation of an ion–plasma flux. Physico-mechanical and tribotechnical characteristics of coatings have been studied. The possibility of their use as efficient protective coatings has been shown.
Appears in Collections:	Наукові видання (ЕлІТ)