Tribological Characteristics of (TiZrHfVNbTa)N Coatings Applied Using the Vacuum Arc Deposition Method

Abstract

The effect of the pressure of the nitrogen atmosphere during the formation of vacuum arc nitride coatings based on high entropy alloys of the Ti–Zr–Hf–V–Nb–Ta system on their structure, hardness, and tribotechnical characteristics is considered. It is shown that strong nitride forming components lead to the dependence of the structural state and properties on the pressure of the nitrogen atmosphere during coating deposition. Deposition at a nitrogen pressure of 0.4 Pa results in the formation of a texture with the [111] axis when the applied bias potential is –70 V and when the bias potential is equal to –150 V the textural structure is biaxial ([111] and [110]) textures and high value of hardness of 51 GPa Along with that the highest value of wear resistance (under oxidizing mechanical wear) is inherent to coatings formed under the pressure of nitro gen of 0.09 Pa. The strongest microdeformation of coating crystallites corresponds to this pressure.