Modeling of Etching Nano-surfaces of Indium Phosphide

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Title	Modeling of Etching Nano-surfaces of Indium Phosphide
Authors	Khrypko, S.L. Kidalov, V.V. Kolominska, E.V.
ORCID
Keywords	InP Porous Modeling Nano-surfaces
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/39046
Publisher	Sumy State University
License	Copyright not evaluated
Citation	S.L. Khrypko, V.V. Kidalov, E.V. Kolominska, J. Nano- Electron. Phys. 7 No 1, 01003 (2015)
Abstract	This paper describes a mechanism for obtaining a regular porous structure InP, which is to use the method of photoelectrochemical etching. Through the use of simulation etching at the nanoscale, it is possible to get a regular uniform grid of nanopores on the surface of indium phosphide, which allows us to understand the mechanisms and the establishment of technological regimes anodic structures indium phosphide to produce a variety of devices.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)