Structure, physical and mechanical properties of the nitride coatings based on Hf, V, Ta, deposited by magnetron sputtering

Abstract

In recent years we have seen increased scientific interest in combinations of transition metals that improve the physico-mechanical and structural properties of coatings. Such elements as: Hf, V, Ta - steel are considered as potential candidates. Due to promising mechanical properties and resistance to high temperatures, nitride compounds of Hf, V, Ta are receiving increased attention from researchers and end-users. Nitride systems were deposited via magnetronic as well as reactive spraying with the help of ion implantation (CMSII). Spraying was performed in an atmosphere of Ar/ and it is worth noting that the variation of partial pressure leads to the formation of multi-phase coatings with amorphous, crystalline and quasi-amorphous phase.