Regularities of Al layer structure formation near phase equilibrium in plasma–condensate system

Perekrestov, Viacheslav Ivanovych; Korniushchenko, Hanna Serhiivna; Kosminska, Yuliia Oleksandrivna

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Title	Regularities of Al layer structure formation near phase equilibrium in plasma–condensate system
Authors	Perekrestov, Viacheslav Ivanovych Korniushchenko, Hanna Serhiivna Kosminska, Yuliia Oleksandrivna
ORCID	http://orcid.org/0000-0002-2996-1003 http://orcid.org/0000-0002-2175-9206
Keywords	plasma-condensate system isotropic substrate
Type	Article
Date of Issue	2008
URI	http://essuir.sumdu.edu.ua/handle/123456789/4100
Publisher	Physics of the Solid State
License	Copyright not evaluated
Citation	Perekrestov, V.I. Regularities of Al layer structure formation near phase equilibrium in plasma–condensate system [Текст] / V.I. Perekrestov, H.S. Korniushchenko, Y.O. Kosminska // Physics of the Solid State. — 2008. — vol. 50. — No. 7. — 1357-1364
Abstract	A fundamentally new technological approach to creating porous metal structures on isotropic substrates during condensation of a reverse diffusion flow in a planar dc magnetron is proposed. The physical foundations of the operation of self-organized sputtering systems are analyzed. Conditions of the formation of main varieties of porous structures, such as weakly coupled micro- and nanocrystals, and three-dimensional labyrinth structures, are found using scanning electron microscopy. It is established that the main prerequisites for the formation of pores are the stationarity of the process and proximity to the phase equilibrium in the plasma–condensate system. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/4100
Appears in Collections:	Наукові видання (ЕлІТ)