AlMgB14-Based Films Prepared by Magnetron Sputtering at Various Substrate Temperatures

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Title	AlMgB14-Based Films Prepared by Magnetron Sputtering at Various Substrate Temperatures
Authors	Ivashchenko, V.I. Scrynskyy, P.L. Dub, S.N. Tomofeeva, I.I. Butenko, O.O. Kozak, A.O.
ORCID
Keywords	AlMgB14 Magnetron Sputtering Infrared Spectroscopy Hardness Tribological Properties
Type	Conference Papers
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/42719
Publisher	Sumy State University
License	Copyright not evaluated
Citation	AlMgB14-Based Films Prepared by Magnetron Sputtering at Various Substrate Temperatures [Текст] / V.V. Ivashchenko, P.L. Scrynskyy, S.N. Dub et al. // Nanomaterials: Applications & Properties (NAP-2015) : Proceedings of the International Conference. — Sumy : Sumy State University, 2015. — V.4, No1. — 01NTF07.
Abstract	The films were deposited by magnetron sputtering the AlMgB14 target at different substrate temperatures (TS) in the range of 100-500 C. The films were annealed at 1000 C in vacuum. The deposited films were characterized by XRD, AFM, FTIR spectroscopy, nano- and micro-indentation and scratch testing. The films exhibit hardness that is much lower than the one of the bulk AlMgB14 materials, which is due to the amorphous film structure in which the strong B-B bonds are absent and the weaker B-O bonds dominate.
Appears in Collections:	Наукові видання (ЕлІТ)