About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN

Beresnev, V.M.; Sobol’, O.V.; Pohrebniak, Oleksandr Dmytrovych; Nyemchenko, U.S.; Grankin, S.S.; Stolbovoy, V.A.; Turbin, P.V.; Meylehov, A.A.; Arseenko, M.Ju.

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Title	About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN
Authors	Beresnev, V.M. Sobol’, O.V. Pohrebniak, Oleksandr Dmytrovych Nyemchenko, U.S. Grankin, S.S. Stolbovoy, V.A. Turbin, P.V. Meylehov, A.A. Arseenko, M.Ju.
ORCID	http://orcid.org/0000-0002-9218-6492
Keywords	Vacuum-arc coatings Multilayer coating Hard coatings Vacuum-arc deposition
Type	Conference Papers
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/42799
Publisher	Sumy State University
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Citation	About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN [Текст] / V.M. Beresnev, O.V. Sobol', A.D. Pogrebnjak et al. // Nanomaterials: Applications & Properties (NAP-2015) : Proceedings of the International Conference. — Sumy : Sumy State University, 2015. — V.4, No1. — 01FNC01.
Abstract	Applying transition metal nitrides of Mo and Cr, which are characterized by a relatively low heat of formation, as the components of the multilayer coating, the possibilities of elemental and structural engineering of vacuum-arc coatings under the influence of the bias potential Us and the reaction gas pressure PN are revealed. It was found that at a relatively small thickness of the layers of nanometer range, which provides superhard state of the coatings, the supply of Us with the value of above the critical leads to a drop in hardness, which can be explained by mixing of layers at the interphase boundary.
Appears in Collections:	Наукові видання (ЕлІТ)