About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN

Beresnev, V.M.; Sobol’, O.V.; Pohrebniak, Oleksandr Dmytrovych; Nyemchenko, U.S.; Grankin, S.S.; Stolbovoy, V.A.; Turbin, P.V.; Meylehov, A.A.; Arseenko, M.Ju.

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Title	About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN
Authors	Beresnev, V.M. Sobol’, O.V. Pohrebniak, Oleksandr Dmytrovych Nyemchenko, U.S. Grankin, S.S. Stolbovoy, V.A. Turbin, P.V. Meylehov, A.A. Arseenko, M.Ju.
ORCID	http://orcid.org/0000-0002-9218-6492
Keywords	Vacuum-arc coatings Multilayer coating Hard coatings Vacuum-arc deposition
Type	Conference Papers
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/42799
Publisher	Sumy State University
License	Copyright not evaluated
Citation	About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN [Текст] / V.M. Beresnev, O.V. Sobol', A.D. Pogrebnjak et al. // Nanomaterials: Applications & Properties (NAP-2015) : Proceedings of the International Conference. — Sumy : Sumy State University, 2015. — V.4, No1. — 01FNC01.
Abstract	Applying transition metal nitrides of Mo and Cr, which are characterized by a relatively low heat of formation, as the components of the multilayer coating, the possibilities of elemental and structural engineering of vacuum-arc coatings under the influence of the bias potential Us and the reaction gas pressure PN are revealed. It was found that at a relatively small thickness of the layers of nanometer range, which provides superhard state of the coatings, the supply of Us with the value of above the critical leads to a drop in hardness, which can be explained by mixing of layers at the interphase boundary.
Appears in Collections:	Наукові видання (ЕлІТ)