Structure and substructure properties of magnesium oxide thin films

Diachenko, Oleksii Viktorovych; Diachenko, Oleksii Viktorovych; Opanasiuk, Anatolii Serhiiovych; Kurbatov, Denys Ihorovych; Панчал, Ч.; Panchal, Ch.

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Title	Structure and substructure properties of magnesium oxide thin films
Authors	Diachenko, Oleksii Viktorovych Diachenko, Oleksii Viktorovych Opanasiuk, Anatolii Serhiiovych Kurbatov, Denys Ihorovych Панчал, Ч. Panchal, Ch.
ORCID	http://orcid.org/0000-0003-2312-5255 http://orcid.org/0000-0003-2312-5255 http://orcid.org/0000-0002-1888-3935 http://orcid.org/0000-0002-2754-6367
Keywords	MgO спрей піроліз спрей пиролиз spray pyrolysis рентгеноструктурний аналіз рентгеноструктурный анализ x-ray diffraction analysis мікронапруга микронапряжение microstrain
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/43177
Publisher	Proceedings of International Symposium on Semiconductor Materials and Devices
License	Copyright not evaluated
Citation	Structure and substructure properties of magnesium oxide thin films [Текст] / O.V. Diachenko, A.S. Opanasuyk, D.I. Kurbatov, Ch. Panchal // Proceedings of International Symposium on Semiconductor Materials and Devices. - 2015. - P.2-5.
Abstract	In this paper we have conducted a comprehensive study of the structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. Thin films MgO were prepared by spray pyrolysis technique from a magnesium chloride solution. Identified the phase composition, the lattice constant, crystallite size and coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of homogeneous single-phase films of stoichiometric composition were identified.
Appears in Collections:	Наукові видання (ЕлІТ)