Initiation of Polarized State in the Tantalum Oxide Thin Films Grown by Magnetron Sputtering on a Substrate of Monocrystalline Silicon (100) Followed by Argon and Oxygen Ions

Goncharov, I.Yu.; Kolesnikov, D.A.; Zykova, A.V.; Safonov, V.I.

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Title	Initiation of Polarized State in the Tantalum Oxide Thin Films Grown by Magnetron Sputtering on a Substrate of Monocrystalline Silicon (100) Followed by Argon and Oxygen Ions
Authors	Goncharov, I.Yu. Kolesnikov, D.A. Zykova, A.V. Safonov, V.I.
ORCID
Keywords	Thin films of tantalum oxide Magnetron sputtering Kelvin probe microscopy Polarization and depolarization
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/44542
Publisher	Sumy State University
License	Copyright not evaluated
Citation	I.Yu. Goncharov, D.A. Kolesnikov, A.V. Zykova, V.I. Safonov, J. Nano- Electron. Phys. 7 No 4, 04074 (2015)
Abstract	The pictures of the induced state and the surface potential distribution in thin films of tantalum oxide produced by magnetron sputtering onto a substrate of monocrystalline silicon (100) followed by low energy argon and oxygen ions was investigated by atomic force microscopy in spreading resistance and scanning Kelvin probe microscopy mode. It was shown that it is possible to polarize or depolarize the coating, and then to visualize the state of the induced polarization using an electric field applied via the conductive cantilever in contact spreading resistance microscopy mode. It was found that treatment with argon ions increases the contrast of the of the surface potential distribution maps from 1.2 V to 2,3 V for negative – 10 V voltage on the probe and from 9,6 V to 19,2 V for a positive + 10 V voltage in comparison with the oxygen ions.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)