Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/44542
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Initiation of Polarized State in the Tantalum Oxide Thin Films Grown by Magnetron Sputtering on a Substrate of Monocrystalline Silicon (100) Followed by Argon and Oxygen Ions |
Authors |
Goncharov, I.Yu.
Kolesnikov, D.A. Zykova, A.V. Safonov, V.I. |
ORCID | |
Keywords |
Thin films of tantalum oxide Magnetron sputtering Kelvin probe microscopy Polarization and depolarization |
Type | Article |
Date of Issue | 2015 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/44542 |
Publisher | Sumy State University |
License | |
Citation | I.Yu. Goncharov, D.A. Kolesnikov, A.V. Zykova, V.I. Safonov, J. Nano- Electron. Phys. 7 No 4, 04074 (2015) |
Abstract |
The pictures of the induced state and the surface potential distribution in thin films of tantalum oxide
produced by magnetron sputtering onto a substrate of monocrystalline silicon (100) followed by low energy
argon and oxygen ions was investigated by atomic force microscopy in spreading resistance and scanning
Kelvin probe microscopy mode. It was shown that it is possible to polarize or depolarize the coating, and
then to visualize the state of the induced polarization using an electric field applied via the conductive cantilever
in contact spreading resistance microscopy mode. It was found that treatment with argon ions increases
the contrast of the of the surface potential distribution maps from 1.2 V to 2,3 V for negative
– 10 V voltage on the probe and from 9,6 V to 19,2 V for a positive + 10 V voltage in comparison with the
oxygen ions. |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
Views
Bulgaria
1681961
Canada
1
France
3
Germany
1681960
Ireland
22708
Italy
1
Japan
25637188
Lithuania
1
Poland
1
Russia
1
Seychelles
1
Singapore
1
Sweden
1
Ukraine
560753
United Kingdom
281006
United States
112130846
Unknown Country
560752
Vietnam
1893
Downloads
China
10
France
1
Germany
2
Indonesia
1
Japan
112130845
Lithuania
1
Ukraine
1681959
United Kingdom
1
United States
112130841
Unknown Country
8
Vietnam
1
Files
File | Size | Format | Downloads |
---|---|---|---|
Goncharov_Magnetron_sputtering.pdf | 876.47 kB | Adobe PDF | 225943670 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.