Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate

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Title	Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate
Authors	Kuzmenko, A.P. Kuzkо, A.E. Dint, Naw Than, Myo Min Dobromyslov, M.B. Emelyanov, S.G. Chervyakov, L.M.
ORCID
Keywords	Nanostructure Magnetron method Ceramic Substrate
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/44568
Publisher	Sumy State University
License	Copyright not evaluated
Citation	A.P. Kuzmenko, A.E. Kuzko, Naw Dint, et al., J. Nano- Electron. Phys. 7 No 4, 04095 (2015)
Abstract	The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship between amplitude and phase-frequency components of ellipsometric measurements and phase structure transformations has been established. The structural transition in the vicinity of 573 K, has been found.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)