Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate

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Title	Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate
Authors	Kuzmenko, A.P. Kuzkо, A.E. Dint, Naw Than, Myo Min Dobromyslov, M.B. Emelyanov, S.G. Chervyakov, L.M.
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Keywords	Nanostructure Magnetron method Ceramic Substrate
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/44568
Publisher	Sumy State University
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Citation	A.P. Kuzmenko, A.E. Kuzko, Naw Dint, et al., J. Nano- Electron. Phys. 7 No 4, 04095 (2015)
Abstract	The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship between amplitude and phase-frequency components of ellipsometric measurements and phase structure transformations has been established. The structural transition in the vicinity of 573 K, has been found.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)