Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles

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Title	Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
Authors	Panfilov, V.I. Pugachevskii, M.A. Kuzmenko, A.P. Dobromyslov, M.B.
ORCID
Keywords	Laser ablation Nanoparticles Hafnium dioxide High-temperature phase
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/44573
Publisher	Sumy State University
License	Copyright not evaluated
Citation	V.I. Panfilov, M.A. Pugachevskii, A.P. Kuzmenko, M.B. Dobromyslov, J. Nano- Electron. Phys. 7 No 4, 04099 (2015)
Abstract	The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 % are formed on the surface of the substrate at room temperature during the laser ablation with intensity of 1010 W/m2. It is shown that with increasing the substrate temperature the average size of the ablated nanoparticles decreases and the quantitative content of the high-temperature phases is increased up to 70 %.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)