Influence of thermal annealing and deposition conditions on structure and physical-mechanical properties of multilayered nanosized TiN/ZrN coatings

Pohrebniak, Oleksandr Dmytrovych; Bondar, Oleksandr Viacheslavovych; Erdybaeva, N.K.; Plotnikov, S.V.; Turbin, P.V.; Grankin, S.S.; Stolbovoy, V.A.; Sobol, O.V.; Kolesnikov, D.A.; Kozak, C.

Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/46287

Or use following links to share this resource in social networks: Recommend this item

Title	Influence of thermal annealing and deposition conditions on structure and physical-mechanical properties of multilayered nanosized TiN/ZrN coatings
Authors	Pohrebniak, Oleksandr Dmytrovych Bondar, Oleksandr Viacheslavovych Erdybaeva, N.K. Plotnikov, S.V. Turbin, P.V. Grankin, S.S. Stolbovoy, V.A. Sobol, O.V. Kolesnikov, D.A. Kozak, C.
ORCID	http://orcid.org/0000-0002-9218-6492 http://orcid.org/0000-0003-3174-0709
Keywords	вакуумно-дугове осадження вакуумно-дуговое осаждение vacuum-arc deposition багатошарові TiN/ZrN покриття многослойные TiN/ZrN покрытия multilayered TiN/ZrN coatings структура поверхневих шарів структура поверхностных слоев structure of surface layers механічні властивості механические свойства mechanical properties
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/46287
Publisher	Society of Polish Electrical and Electronics Engineers
License
Citation	Influence of thermal annealing and deposition conditions on structure and physical-mechanical properties of multilayered nanosized TiN/ZrN coatings [Текст] / A.D. Pogrevbjak, O.V. Bondar, N.K. Erdybaeva [et al.] // Przeglad Elektrotechniczny. — 2015. — №1(12). — С. 228-232.
Abstract	Nanostructured multilayered TiN/ZrN coatings were fabricated using vacuum-arc deposition method. Amount of layers was 134-533; average bilayer thickness was 20-125 nm depending on deposition conditions. Good planarity of nanoscale bilayers were observed. Regularities of phase-structure changes in surface layers under the influence of aggressive oxygen atmosphere and high temperature (700С) annealing were established as a model of critical working conditions. Bilayer thickness influence on hardness was explored. Maximum hardness was 42 GPa.
Appears in Collections:	Наукові видання (ЕлІТ)