Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/46966
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Studying of nanocomposite films’ structure and properties obtained by magnetron sputtering |
Authors |
Tleukenov, Y.O.
Plotnikov, S.V. Erdybaeva, N.K. Pohrebniak, Oleksandr Dmytrovych ![]() |
ORCID |
http://orcid.org/0000-0002-9218-6492 |
Keywords |
Nanocomposite Nb-Al-N films magnetron sputtering hardness |
Type | Article |
Date of Issue | 2016 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/46966 |
Publisher | IOP Publishing |
License | Copyright not evaluated |
Citation | Studying of nanocomposite films’ structure and properties obtained by magnetron sputtering [Текст] / Y.O. Tleukenov, S.Р. Plotnikov, N.K. Erdybaeva, A.D. Pogrebnjak // IOP Conf. Series: Materials Science and Engineering. — 2016. — №110. — С. 012004(1)-012004(5). |
Abstract |
Various approaches to creating multicomponent na-nocomposite coatings of high and superhigh hardness (from 30 to 100 ± 120 GPa) are reviewed with particular emphasis placed on mechanisms underlying the increase in hardness in thin coatings. Nanocomposite Nb-Al-N films fabricated by magnetron sputtering were researched in this work. Two stable crystalline structural states were found in the films: NbNch and
solid solution В1-NbxAl1-xNyO1-y, and also an amorphous component associated with aluminum oxynitride with reactive magnetron sputtering. A relationship of substructural characteristics sensitivity with the current and nanohardness and Knoop hardness characteristic was determined in this paper. Recent changes in the range of 29-33.5 GPa and 46-48 GPa, respectively. Initial principle calculations of NbN and
Nb2AlN phases and NbN/AlN heterostructures were carried out for the interpretation of the results. Deposited nanocomposite films with the given mechanical properties
may be used as wear resistant or protective coatings. On the basis of these results, it
can be assumed that two stable crystalline structural states were found in the films:
В1-NbNx and solid solution with a composition close to the В1-Nb0.67Al0.33N. The
films also contain an amorphous component associated with aluminum nitride. |
Appears in Collections: |
Наукові видання (ЕлІТ) |
Views

1

1

2

261039896

52232

793236

1

127

1

1

1

14199843

7109719

261039899

558487038

1

52234
Downloads

1

1

4348095

224632648

261039897

1

1

1

1

1

42596421

151818156

1

188225403

558487038

1
Files
File | Size | Format | Downloads |
---|---|---|---|
Studying of nanocomposit_Tleukenov.pdf | 1.14 MB | Adobe PDF | 1431147667 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.