Functional properties of multilayer vacuum-arc TiN/ZrN coatings

Abstract

Nanostructured multilayer Ti/ZrN coatings were synthesized by vacuum-arc deposition with a number of layers 134-533 and an average thickness 20-125nm of layers. A good planarity was revealed resulting in a range of nanometer layer from plasma streams in a reactive environment. Phase-structural changes mechanisms were established as a model of critical operating coatings’ conditions of in the surface layers under the action of an aggressive oxygen atmosphere at high temperature (700 0C). The thickness parameter effect on its hardness of the multilayer system was shown. It was found that the maximum hardness of 42 GPa and the lowest abrasion of coating 1,3 ×10–5 mm3×Н–1×mm–and counterbody 1,9 ×10–6 мм3×Н–1×мм–1 inherent in TiN/ZrN system with the smallest layer thickness of 20 nm in the period. The results are explained by the influence of the size factor interphase boundaries magnified in a multilayer system with a nanometer thick layers.