Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/46973
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations |
Authors |
Pohrebniak, Oleksandr Dmytrovych
Bondar, Oleksandr Viacheslavovych Abadias, G. Ivashchenko, V. Sobol, O. Jurga, S. Coy, E. |
ORCID |
http://orcid.org/0000-0002-9218-6492 http://orcid.org/0000-0003-3174-0709 |
Keywords |
Nitrides Films Hardness Mechanical properties Strength |
Type | Article |
Date of Issue | 2016 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/46973 |
Publisher | Elsevier |
License | |
Citation | Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations [Текст] / A.D. Pogrebnjak, O.V. Bondar, G. Abadias [et al.] // Ceramics International. — 2016. — №42. — С. 11743-11756. |
Abstract |
The structural and mechanical properties of NbN and Nb-Si-N films have been investigated both experimentally and theoretically, in their as-deposited and annealed states. The films were deposited using
magnetron sputtering at substrate bias (UB) between 0 and 70 V. While NbN films were found to crystallize in the cubic δ-NbN structure, Nb-Si-N films with Si content of 11–13 at% consisted of a twophases nanocomposite structure where δ-NbN nanocrystals were embedded in SiNx amorphous matrix.
Films deposited at UB¼0 V were highly (001)-textured. Application of substrate bias potential led to a
depletion of light atoms, and caused a grain size refinement concomitantly with the increase of (111)
preferred orientations in both films. The maximum hardness was 28 GPa and 32 GPa for NbN and Nb-SiN
films, respectively. NbN and Nb-Si-N films deposited at UB¼ 70 V exhibited compressive stress of 3
and 4 GPa, respectively. After vacuum annealing, a decrease in the stress-free lattice parameter was
observed for both films, and attributed to alteration of film composition. To obtain insights on interface
properties and related mechanical and thermal stability of Nb-Si-N nanocomposite films, first principles
molecular dynamics simulations of NbN/SiNx heterostructures with different structures (cubic and
hexagonal) and atomic configurations were carried out. All the hexagonal heterostructures were found to
be dynamically stable and weakly dependent on temperature. Calculation of the tensile strain-stress
curves showed that the values of ideal tensile strength for the δ-NbN(111)- and ε-NbN(001)-based
heterostructures with coherent interfaces and Si3N4–like Si2N3 interfaces were the highest with values in
the range 36–65 GPa, but lower than corresponding values of bulk NbN compound. This suggests that
hardness enhancement is likely due to inhibition of dislocation glide at the grain boundary rather than
interfacial strengthening due to Si-N chemical bonding |
Appears in Collections: |
Наукові видання (ЕлІТ) |
Views
Belgium
1
Canada
1340530
China
1214918824
Côte d’Ivoire
1
Finland
1
France
1
Germany
3837
Greece
168044
India
9548
Ireland
4857968
Japan
1
Lithuania
1
Netherlands
9552
Singapore
1159641799
Sweden
1
Thailand
1
Ukraine
380053581
United Kingdom
68200538
United States
836212285
Unknown Country
-1132080323
Uzbekistan
1
Vietnam
168046
Downloads
Algeria
1214918823
Australia
1
Austria
1
Azerbaijan
1
Brazil
-1283632857
Canada
4
China
-502697586
France
1159641802
Georgia
1
Germany
512782770
Greece
85957
Hong Kong SAR China
51925215
India
-1472986117
Iran
1
Ireland
9715931
Italy
1214918816
Japan
1159641798
Jordan
1
Kazakhstan
1
Lithuania
1214918816
Morocco
-1283632856
Netherlands
922334
Norway
1
Poland
1
Portugal
1
Romania
3
Russia
6
Saudi Arabia
4
Singapore
1159641800
Slovakia
1
South Korea
512782769
Sweden
3840
Taiwan
1214918819
Ukraine
-1283632855
United Arab Emirates
1
United Kingdom
1159641801
United States
-502697589
Unknown Country
-1132080323
Vietnam
168047
Files
File | Size | Format | Downloads |
---|---|---|---|
Structural_and_mechanical_Pogrebnjak.pdf | 4.84 MB | Adobe PDF | -1169698112 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.