Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering

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Title	Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering
Authors	Asvarov, A.Sh. Makhmudov, S.Sh. Abduev, A.Kh. Akhmedov, A.K. Aliev, M.A. Bilalov, B.A.
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Keywords	ZnO Mg thin film Magnetron sputtering Structural parameters Transmittance Band gap
Type	Article
Date of Issue	2016
URI	http://essuir.sumdu.edu.ua/handle/123456789/49840
Publisher	Sumy State University
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Citation	A.Sh. Asvarov, S.Sh. Makhmudov, A.Kh. Abduev, et al., J. Nano- Electron. Phys. 8 No 4(2), 04053 (2016)
Abstract	This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural and optical properties of the ZnO:Mg thin films were investigated. The experiment results showed that the ZnO and ZnO:Mg thin films are polycrystalline with a hexagonal wurtzite structure exhibiting a preferred (002) crystal plane orientation. The results indicated that the crystallinity of ZnO:Mg thin films was significantly affected by both Mg-doping and the woking gas composition. Optical studies revealed that the optical band gap increases with Mg concentration.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)