Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering

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Title	Structural and Optical Properties of Mg Doped ZnO Thin Films Deposited by DC Magnetron Sputtering
Authors	Asvarov, A.Sh. Makhmudov, S.Sh. Abduev, A.Kh. Akhmedov, A.K. Aliev, M.A. Bilalov, B.A.
ORCID
Keywords	ZnO Mg thin film Magnetron sputtering Structural parameters Transmittance Band gap
Type	Article
Date of Issue	2016
URI	http://essuir.sumdu.edu.ua/handle/123456789/49840
Publisher	Sumy State University
License	Copyright not evaluated
Citation	A.Sh. Asvarov, S.Sh. Makhmudov, A.Kh. Abduev, et al., J. Nano- Electron. Phys. 8 No 4(2), 04053 (2016)
Abstract	This paper reports the growth and characterization of transparent magnesium doped zinc oxide (ZnO:Mg) thin films prepared on glass substrates by dc magnetron sputtering. The effects of the Mg concentrations (0, 1 and 5 at %) and working gas compositions (pure Ar and Ar-O2 mixture) on the structural and optical properties of the ZnO:Mg thin films were investigated. The experiment results showed that the ZnO and ZnO:Mg thin films are polycrystalline with a hexagonal wurtzite structure exhibiting a preferred (002) crystal plane orientation. The results indicated that the crystallinity of ZnO:Mg thin films was significantly affected by both Mg-doping and the woking gas composition. Optical studies revealed that the optical band gap increases with Mg concentration.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)