New Computer System for Recognizing Micro- and Nano-Sized Objects in Semiconductors and Colloidal Solutions

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Title	New Computer System for Recognizing Micro- and Nano-Sized Objects in Semiconductors and Colloidal Solutions
Authors	Diachenko, L. Minov, E. Ostapov, S. Fochuk, P. Khalavka, Yu. Bolotnikov, A. James, R.B.
ORCID
Keywords	Optical defect recognition Nano-tracking analysis Computer vision Growth defects Software developing
Type	Article
Date of Issue	2016
URI	http://essuir.sumdu.edu.ua/handle/123456789/49901
Publisher	Sumy State University
License	Copyright not evaluated
Citation	L. Diachenko, E. Minov, S. Ostapov, et al., J. Nano- Electron. Phys. 8 No 4(2), 04060 (2016)
Abstract	In this paper it is describe a new approach developed for recognizing micro- and nano-sized objects and a method for quantitative analysis of these objects. For this purpose was developed the automated systems that can simplify and accelerate the process of nanoparticle tracks analysis under the microscope whereby engineers and scientists are able to recognize the structures of defects in semiconductor wafers, along with nanoparticles and other microscopic objects. This capability is important to both select appropriate crystals and also to apply the data to improve the production process.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)