Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings

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Title	Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings
Authors	Sudzhanskaya, I.V. Poplavsky, А.I. Goncharov, I.Y. Glukhov, O.V.
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Keywords	Carbon films Electrical capacity Conductivity Morphology surface
Type	Article
Date of Issue	2017
URI	http://essuir.sumdu.edu.ua/handle/123456789/66052
Publisher	Sumy State University
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Citation	Influence of the Angle of Inclination of the Plasma Flow of Carbon to the Substrate on the Electrical Capacitance and Morphology of the Surface of Carbon Coatings [Текст] / I.V. Sudzhanskaya, А.I. Poplavsky, I.Yu Goncharov, O.V. Glukhov // Журнал нано- та електронної фізики. – 2017. – Т.9, № 6. – 06027. – DOI: 10.21272/jnep.9(6).06027.
Abstract	Carbon film was obtained by pulsed vacuum-arc method on the silicon wafers. Method of impedance spectroscopy was obtained results change of electrical capacitance of parameters obtained carbon films. Morphology of surface produce by scanning probe microscopy methods was investigated. Determine correlation dependence between electrical capacity of carbon films and morphology surface against condition theirs obtainment. The explanation of the obtained results was proposed.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)