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Title | Formation of the Microcrystalline Structure in LiNbO3 Thin Films by Pulsed Light Annealing |
Authors |
Zhukov, R.N.
Ilina, T.S. Skryleva, E.A. Senatulin, B.R. Kubasov, I.V. Kiselev, D.A. Suchaneck, G. Malinkovich, M.D. Parkhomenko, Yu.N. Savchenko, A.G. |
ORCID | |
Keywords |
Li/Nb ratio rf-magnetron sputtering post-growth infrared rapid annealing piezoresponse force microscopy X-ray photoelectron spectroscopy |
Type | Article |
Date of Issue | 2018 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/68698 |
Publisher | Sumy State University |
License | Copyright not evaluated |
Citation | Formation of the Microcrystalline Structure in LiNbO[3] Thin Films by Pulsed Light Annealing [Текст] / R.N. Zhukov, T.S. Ilina, E.A. Skryleva [et al.] // Журнал нано- та електронної фізики. - 2018. - Т. 10, № 2. - 02009. - DOI: 10.21272/jnep.10(2).02009. |
Abstract |
LiNbO3 thin films with a thickness of 200 nm were deposited onto Al2O3 substrate by RF-magnetron
sputtering technique without intentional substrate heating. The results demonstrate that post-growth
infrared pulsed light annealing of the amorphous LiNbO3 films leads to the formation of two phases,
LiNbO3 and LiNb3O8. After annealing at temperatures of 700 to 800 °C, the percentage of the nonferroelectric
phase LiNb3O8 was minimal. The surface composition of the films annealed at different
temperatures was examined by X-ray photoelectron spectroscopy. Piezoresponse force microscopy was used
to study both the vertical and the lateral polarization and to visualize the piezoelectric inactivity of
LiNb3O8 grains. A comparison of the results of PFM and XPS measurements revealed that there is a
correlation between the fraction of the piezoelectric phase and the film composition: At an annealing
temperature higher than 850 °C, the atomic ratio of lithium to niobium decreases compared to the initial
value along with a decrease of the fraction of the piezoelectric phase. |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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File | Size | Format | Downloads |
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Zhukov_formation.pdf | 646.1 kB | Adobe PDF | -882569745 |
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