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Title | Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma |
Authors |
Nakysbekov, Zh.T.
Buranbayev, M.Zh. Aitzhanov, M.B. Suyundykova, G.S. Gabdullin, M.T. |
ORCID | |
Keywords |
copper copper nanopowder nanoparticles PVD method RF plasma synthesis cathode sputtering |
Type | Article |
Date of Issue | 2018 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/69948 |
Publisher | Sumy State University |
License | |
Citation | Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma [Текст] / Zh.T. Nakysbekov, M.Zh. Buranbayev, M.B. Aitzhanov [et al.] // Журнал нано- та електронної фізики. - 2018. - Т.10, № 3. - 03010. - DOI: 10.21272/jnep.10(3).03010. |
Abstract |
The paper describes the design features of the synthesis of copper nanoparticles by the cathode sputtering
method in radio-frequency plasma. The dependence of the size and number of Cu nanoparticles on
the plasma power, sputtering time, gas flow and pressure was studied. Optimal parameters for obtaining
copper particles with an extended fractal structure were determined. |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
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