Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma

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Title	Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma
Authors	Nakysbekov, Zh.T. Buranbayev, M.Zh. Aitzhanov, M.B. Suyundykova, G.S. Gabdullin, M.T.
ORCID
Keywords	copper copper nanopowder nanoparticles PVD method RF plasma synthesis cathode sputtering
Type	Article
Date of Issue	2018
URI	http://essuir.sumdu.edu.ua/handle/123456789/69948
Publisher	Sumy State University
License	Copyright not evaluated
Citation	Synthesis of Copper Nanoparticles by Cathode Sputtering in Radio-frequency Plasma [Текст] / Zh.T. Nakysbekov, M.Zh. Buranbayev, M.B. Aitzhanov [et al.] // Журнал нано- та електронної фізики. - 2018. - Т.10, № 3. - 03010. - DOI: 10.21272/jnep.10(3).03010.
Abstract	The paper describes the design features of the synthesis of copper nanoparticles by the cathode sputtering method in radio-frequency plasma. The dependence of the size and number of Cu nanoparticles on the plasma power, sputtering time, gas flow and pressure was studied. Optimal parameters for obtaining copper particles with an extended fractal structure were determined.
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)