Please use this identifier to cite or link to this item:
https://essuir.sumdu.edu.ua/handle/123456789/77350
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Analytical Study of Graphene as a Novel Piezoresistive Material for MEMS Pressure Sensor Application |
Authors |
Samridhi,
Sharma, Mayuri Singh, Kulwant Kumar, Shalendra Alvi, P.A. |
ORCID | |
Keywords |
graphene piezoresistive sensors MEMS |
Type | Article |
Date of Issue | 2020 |
URI | https://essuir.sumdu.edu.ua/handle/123456789/77350 |
Publisher | Sumy State University |
License | |
Citation | Analytical Study of Graphene as a Novel Piezoresistive Material for MEMS Pressure Sensor Application [Текст] / Samridhi, Mayuri Sharma, Kulwant Singh [et al.] // Журнал нано- та електронної фізики. – 2020. – Т. 12, № 2. – 02001. – DOI: 10.21272/jnep.12(2).02001. |
Abstract |
The one-atom thick layer of carbon has been investigated with its unique exclusive property such as high thermal conductivity due to the high velocity of electron and exceptional electrical conductivity as well as mechanical strength. Due to its extraordinary properties; graphene put back many conventional materials to due smart, sensitive applications. As graphene has no band gap (Eg ~0 eV) but there is one method to induce a band gap by applying strain and each specific strain direction will create a unique band
gap structure, in return it give signals which can be sensed by the device. The device can be operated either optically or electrically at different pressure levels up to Tera Pascal range thereby providing designers and engineers with a versatile sensing solution. To fabricate MEMS sensor based on a single layer of graphene, the piezoresistive pressure is becoming the most devastating problem up to nanoscale without damaging and high quality, defect free graphene. In this paper, we discussed the issues and cost effective
solutions to integrate MEMS/NEMS pressure sensor device. We also compared the sensor performance with traditional piezoresistive materials. |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
Views
Austria
1
China
1079601076
Finland
1
Germany
918550624
Greece
1
Hong Kong SAR China
1
India
918550619
Iran
141
Ireland
604553
Italy
1
Japan
1
Lithuania
1
Malaysia
90218349
Netherlands
1
Singapore
-573338411
South Korea
1
Taiwan
1069519631
Ukraine
138010
United Kingdom
918550616
United States
-445907255
Unknown Country
-318476101
Vietnam
3231
Downloads
Algeria
1
China
1079601077
Finland
1
Germany
1
Hong Kong SAR China
1
India
918550620
Indonesia
1
Iran
1
Italy
3230
Lithuania
1
Ukraine
2039352572
United Kingdom
918550617
United States
-573338412
Vietnam
1
Files
File | Size | Format | Downloads |
---|---|---|---|
Samridhi_JNEP_2_2020.pdf | 447.62 kB | Adobe PDF | 87752416 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.