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Title Experimental Test of a Three-Dimensional Model for Electrophysical Properties of Metal Films
Authors Chornous, Anatolii Mykolaiovych  
Opanasiuk, Nadiia Mykolaivna
Pohrebniak, Oleksandr Dmytrovych  
Protsenko, Ivan Yukhymovych  
ORCID http://orcid.org/0000-0002-5009-5445
http://orcid.org/0000-0002-9218-6492
http://orcid.org/0000-0003-3351-9303
Keywords thin film
size effects
thermal coefficient of resistance
тонка плівка
розмірні ефекти
температурний коефіцієнт опору
тонкая пленка
размерные эффекты
температурный коэффициент сопротивления
Type Article
Date of Issue 2000
URI http://essuir.sumdu.edu.ua/handle/123456789/846
Publisher The Japan Society of Applied Physics
License
Citation Experimental Test of a Three-Dimensional Model for Electrophysical Properties of Metal Films [Text] / A.M. Chornous, N.M. Opanasyuk, A.D. Pogrebnjak, I.Yu. Protsenko // Jpn. J. Appl. Phys. Vol. 39 (2000) pp. L 1320-L 1323 Part 2, No. 12B.
Abstract A three-dimensional model of strain sensitivity proposed by [Tellier, Tosser: Thin Solid Films 59 (1979) 163; Tosser, Tellier and Pichard: J. Mater. Sci. 16 (1981) 944] has been tested for thin Cr, Cu and Co films. The films were obtained by electron-beam evaporation in a vacuum of 10-4 – 10-5 Pa. Film structure stabilization was carried out by heating and cooling at the rate of 3 K/min in the range of 300 to 520 K. The identity of properties of the films obtained on the glass (during the thermal coefficient of resistance (TCR) measuring) and the textolite glass (during the strain-sensitivity coefficient (SSC) measuring) substrates was examined according to Vand method on lattice distortion energy spectra for films of different thickness, where the spectra were calculated from the resistance-temperature data. It has been shown that the experimental results of the strain sensitivity agree with the calculated ones only under the assumption of size dependence of the electron mean-free path. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/846
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