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Title | Electromigration Effects at Epitaxial Growth of Thin Films: Phase-Field Modeling |
Authors |
Dvornychenko, Alina Vasylivna
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ORCID |
http://orcid.org/0000-0003-4530-4262 |
Keywords |
hase-field method epitaxial growth surface structures electromigration numerical simulation statistical characteristics |
Type | Article |
Date of Issue | 2021 |
URI | https://essuir.sumdu.edu.ua/handle/123456789/84695 |
Publisher | Department of Physics and Astronomy of the National Academy of Sciences of Ukraine |
License | Creative Commons Attribution 4.0 International License |
Citation | Dvornichenko, A. (2021). Electromigration Effects at Epitaxial Growth of Thin Films: Phase-Field Modeling. Ukrainian Journal of Physics, 66(5), 439. https://doi.org/10.15407/ujpe66.5.439 |
Abstract |
he epitaxial growth of thin films with regard for the anisotropy of the adsorbate surface dif-fusion induced by electromigration effects has been studied theoretically in the framework ofthe phase-field theory and with the use of numerical simulations. The influence of the coef-ficient of electromigration-induced anisotropic diffusion, which is proportional to the appliedelectric field strength, on the dynamics of growth of the film thickness and the height of sur-face structures, growing surface morphology, statistical characteristics of the surface multilayeradsorbate structures, and distribution of surface structures over their heights is revealed. |
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File | Size | Format | Downloads |
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Dvornichenko_effects_2021.pdf | 2.05 MB | Adobe PDF | 254997510 |
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